Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems.
Ortigoza-Diaz J, Scholten K, Larson C, Cobo A, Hudson T, Yoo J, Baldwin A, Weltman Hirschberg A, Meng E. Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems. Micromachines (Basel). 2018 Aug 22; 9(9).